Post-processing techniques for locally self-assembled silicon nanowires
نویسندگان
چکیده
Post-processing techniques are applied after the integration and assembly of nanostructures and Microelectromechanical Systems (MEMS) o realize integrated Nanoelectromechanical Systems (NEMS). Experimentation is focused specifically on the application of post-processing teps to a locally self-assembled micro-to-nano system comprising of suspended silicon nanowires between two MEMS bridges. Local contact etallization, global metallization for rapid system functionalization and the application of aqueous treatment to the NEMS are among the postrocessing techniques studied. These techniques are evaluated for their effectiveness and compatibility with integrated NEMS and traditional EMS processes. It is found that local and global contact metallization techniques effectively alleviate inherent problems at the nano-to-micro ontact and the aqueous treatment study confirms the effectiveness of the super critical drying process for nanostructures. 2006 Elsevier B.V. All rights reserved.
منابع مشابه
Abstract Submitted for the MAR08 Meeting of The American Physical Society Self assembled silicon nanowire Schottky junction assisted by collagen1 DIDIER STIEVENARD, IEMN - DptISEN, BILLEL SAHLI, IEMN-Dpt ISEN, YANNICK COFFINIER, RABAH BOUKHERROUB, IRI FRE2963, OLEG
Submitted for the MAR08 Meeting of The American Physical Society Self assembled silicon nanowire Schottky junction assisted by collagen1 DIDIER STIEVENARD, IEMN DptISEN, BILLEL SAHLI, IEMN-Dpt ISEN, YANNICK COFFINIER, RABAH BOUKHERROUB, IRI FRE2963, OLEG MELNYK, IBL UMR8525, IEMN DPTISEN TEAM, IRI TEAM, IBL TEAM — We present results on self assembled silicon nanowire Schottky junction assisted ...
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